Si Window
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Silicon Window |
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General specification |
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Material |
Si(Silicon) |
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Focal Length Tolerance |
±1% |
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Diameter Tolerance |
+0.0/-0.1mm |
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Thickness Tolerance |
±0.1mm |
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Surface Accuracy |
L/4@632.8nm |
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Surface Quality |
60-40 |
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Centration |
<1 arc min |
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Clear Aperture |
>90% |
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Bevelling |
<0.2 *45 |
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Coating |
8-12um |
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No. |
Dia（mm) |
T(mm) |
SQ |
Flatness |
Parallelism |
CA |
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FWSW01 |
12.7 |
3 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW02 |
25.4 |
3 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW03 |
12.7 |
1 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW04 |
25.4 |
1 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW05 |
50.8 |
3 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW06 |
50.8 |
2 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW07 |
76.2 |
3 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW08 |
76.5 |
5 |
40-20 |
L/4 |
<3 arc min |
>90% |
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FWSW09 |
101.6 |
6 |
40-20 |
L/4 |
<3 arc min |
>90% |
